Refractometer for Testing Electronic & Semiconductor Chemicals.
Save costly re-work and scrap by testing electronic and semiconductor chemicals.
Quick testing of semiconductor chemicals with a refractometer can instantly and accurately detect out of spec chemicals before they negatively impact semiconductor wafer production, causing costly re-work or scrap. The ideal method is to use an inline process refractometer to monitor each process fluid. However, for spot-checking, or for those that cannot afford process automation, a surveillance program using MISCO’s digital handheld refractometer is the next best thing.
The first place to start is the incoming inspection of process chemicals. Even if a certificate of analysis accompanies each chemical, changes can occur to chemical stock during transportation, storage, and handling. Also, a refractometer is ideal for testing the concentration of hydrogen peroxide, which production facilities usually make on-site.
A quick test with a refractometer saves a lot of trouble down the line. Chemical testing should also take place during wafer cleaning, wet etching, and post-etch cleaning, as well as chemical mechanical planarization (CMP).